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on the spark decomposition of SF6 and 50% SF6 + 50% CF4 mixturesThe gaseous by-products , , , , , , and were assayed by gas

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The design and use of equipment and installations applying SF6 gas or SF6/CF4 gas mixtures have been considered in Sect.  12.2and Part C of this

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of Gases in Liquids. 21. Solubility of He, Ne, Ar, Kr, N2,

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Last modification on : Thursday, February 7, 2019 - 4:56:13 PMReactive ion etching of SiC in SF6 gas: detection of CF, CF2 and SiF2